IEC 60204-33:2009

IEC 60204-33:2009

IEC 60204-33:2009 Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

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Details

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Additional Info

Author International Electrotechnical Commission (IEC)
Committee TC 44
Published by IEC
Document type Standard
Edition 1.0
ICS 13.110 : Safety of machinery
25.040.30 : Industrial robots. Manipulators
29.020 : Electrical engineering in general
Number of pages 247
Cross references DIN EN 60204-33 (2011-11), MOD,BS EN 60204-33 (2011-08-31), MOD,EN 60204-33 (2011-03), MOD,FprEN 60204-33 (2010-03), IDT,FprEN 60204-33 (2010-11), MOD,NF C79-130-33 (2012-02-01), MOD,JIS B 9960-33 (2012-05-21), IDT,OEVE/OENORM EN 60204-33 (2011-12-01), NE
Keyword IEC60204-33,IEC 60204-33:2009,IEC 60204-33,TC 44