| Name | Support | Language | Availability | Edition date | Price | ||
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PDF |
German |
Active |
10/1/2013 |
€65.89 |
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Details
This document specifies a test method for surface analysis for the determination of mass fractions of the elements Al (aluminum), As (arsenic), Ba (barium), Be (beryllium), Ca (calcium), Cd (cadmium), Co (cobalt), Cr (chromium), Cu (copper) , Fe (iron), In (indium), K (potassium), Li (lithium), Mg (magnesium), Mn (manganese), Mo (molybdenum), Na (sodium), Ni (nickel), Pb (lead) , Sb (antimony), Sr (strontium), Ti (titanium), V (vanadium), Zn (zinc) and Zr (zirconium) on silicon wafers using ICP-MS.
Additional Info
| Author | Deutsche Institut für Normung e.V. (DIN) |
|---|---|
| Published by | DIN |
| Document type | Standard |
| ICS | 31.200 : Integrated circuits. Microelectronics
|
| Number of pages | 15 |
| Document history | DIN 51456 (2013-10),DIN 51456 (2012-10) |
| Keyword | DIN 51456 |
