DIN 50451-7:2018-04

DIN 50451-7:2018-04

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 7: Determination of 31 elements in high-purity hydrochloric acid by ICP-MS

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Details

This document specifies methods of testing hydrochloric acid for small traces of 31 elements using the inductively coupled plasma mass spectrometry (ICP-MS).

Additional Info

Author Deutsche Institut für Normung e.V. (DIN)
Published by DIN
Document type Standard
ICS 29.045 : Semiconducting materials
Number of pages 14
Document history DIN 50451-7 (2018-04),DIN 50451-7 (2017-09),DIN 50451-7 (2017-02)
Keyword DIN 50451-7