DIN 50450-9:2021-07

DIN 50450-9:2021-07

Testing of materials for semiconductor technology - Determination of impurities in carrier gases and dopant gases - Part 9: Determination of oxygen, nitrogen, carbonmonoxide, carbondioxide, hydrogen and C<(Index)1>-C<(Index)3>-hydrocarbons in gaseous hydrogen chloride by gaschromatography

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Additional Info

Author Deutsche Institut für Normung e.V. (DIN)
Published by DIN
Document type Standard
ICS 29.045 : Semiconducting materials
71.100.20 : Gases for industrial application
Number of pages 8
Replace DIN 50450-9(2003-04),DIN 50450-9(2020-11)
Keyword DIN 50450-9
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