Name | Support | Language | Availability | Edition date | Price | ||
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PDF |
German |
Active |
6/1/2015 |
€72.80 |
|
Details
This document specifies methods for optical topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.
Additional Info
Author | Deutsche Institut für Normung e.V. (DIN) |
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Published by | DIN |
Document type | Standard |
ICS | 39.020 : Precision mechanics
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Number of pages | 18 |
Replace | DIN 32567-5(2014-11) |
Document history | DIN 32567-5 (2015-06),DIN 32567-5 (2014-11) |
Keyword | DIN 32567-5 |