DIN 32567-5:2015-06

DIN 32567-5:2015-06

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices

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Details

This document specifies methods for optical topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.

Additional Info

Author Deutsche Institut für Normung e.V. (DIN)
Published by DIN
Document type Standard
ICS 39.020 : Precision mechanics
Number of pages 18
Replace DIN 32567-5(2014-11)
Document history DIN 32567-5 (2015-06),DIN 32567-5 (2014-11)
Keyword DIN 32567-5