BS IEC 63068-3:2020

BS IEC 63068-3:2020

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Test method using photoluminescence

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Details

Tests,Testing,Integrated circuit technology,Semiconductor devices,Electronic equipment and components

Additional Info

Author British Standards Institution (BSI)
Committee EPL/47 - Electrical
Published by BSI
Document type Standard
EAN ISBN 978 0 539 02136 3
ICS 31.080.01 : Semiconductor devices in general
31.080.99 : Other semiconductor devices
Number of pages 28
Cross references IEC 63068-3 Ed.1.0
Keyword BS IEC 63068-3:2020