BS EN 62047-11:2013

BS EN 62047-11:2013

Semiconductor devices. Micro-electromechanical devices Test method for coefficients of linear thermal expansion free-standing materials micro-electromechanical systems

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Details

Electromechanical devices,Semiconductor technology,Terminology,Integrated circuits,Vocabulary,Semiconductor devices,Electronic equipment and components

Additional Info

Author British Standards Institution (BSI)
Committee EPL/47 - Electrical
Published by BSI
Document type Standard
EAN ISBN 978 0 580 69448 6
ICS 31.080.99 : Other semiconductor devices
Number of pages 24
Cross references EN 62047-11:2013,IEC 62047-11:2013
Keyword BS EN 62047-11:2013