18/30383935 DC:2018

18/30383935 DC:2018

BS EN IEC 62047-37. Semiconductor devices. Micro-electromechanical devices Part 37. Environmental test methods of MEMS piezoelectric thin films for sensor application

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Details

Durability,Sensors,Thin films,Test methods,Semiconductor devices,Electromechanical storage,Environmental testing,Piezoelectric devices

Additional Info

Author British Standards Institution (BSI)
Committee EPL/47 - Electrical
Published by BSI
Document type Draft standard
ICS 31.080.01 : Semiconductor devices in general
31.080.99 : Other semiconductor devices
31.140 : Piezoelectric devices
Number of pages 19
Cross references IEC 62047-37 Ed.1.0
Keyword 18/30383935 DC